Wafer prober

A wafer prober is a system used for electrical testing of wafers in the semiconductor development and manufacturing process. In an electrical test, test signals from a measuring instrument or tester are transmitted to individual devices on a wafer via probe needles or a probe card and the signals are then returned from the device.

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A wafer prober is used for handling the wafer to make contact in the designated position on the device. In semiconductor development, a wafer prober is used mainly for evaluating the characteristics of prototype ICs, reliability evaluation, and defect analysis. In evaluating devices and processes, highly accurate measurement and evaluation of a test element group TEGcomprising transistors, interconnections and other element devices for an IC, is conducted.

This means that electrical noise and signal leakage must be prevented. Additionally, a temperature control function is required for checking operation at low and high temperatures and for reliability evaluation. In evaluating high-power devices, high voltage and low impedance of the measurement path is also required. Functions required for wafer testing include automation of wafer handling and position control, antinoise measures, and reliability. Moreover, high rigidity for one-touchdown with many devices and high speed control for shorter tact time, as well as availability and easy maintenance, are also crucial.

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MJC will meet diverse needs for probers to improve wafer test productivity. What is a wafer prober? What is a package probe test socket? What is an advanced probe card? What is semiconductor test equipment IC tester? What is J-Contacts? What is BeeContacts?

Wafer testing

What is an FPD test? What is a probe unit?Wafer testing is a step performed during semiconductor device fabrication. During this step, performed before a wafer is sent to die preparationall individual integrated circuits that are present on the wafer are tested for functional defects by applying special test patterns to them.

wafer prober

The wafer testing is performed by a piece of test equipment called a wafer prober. A wafer prober is a machine Automatic test equipment used to test integrated circuits.

For electrical testing a set of microscopic contacts or probes called a probe card are held in place whilst the wafer, vacuum-mounted on a wafer chuck, is moved into electrical contact. When a die or array of dice have been electrically tested the prober moves the wafer to the next die or array and the next test can start.

wafer prober

The wafer prober is usually responsible for loading and unloading the wafers from their carrier or cassette and is equipped with automatic pattern recognition optics capable of aligning the wafer with sufficient accuracy to ensure accurate registration between the contact pads on the wafer and the tips of the probes.

For today's multi-die packages such as stacked chip-scale package SCSP or system in package SiP — the development of non-contact RF probes for identification of known tested die KTD and known good die KGD are critical to increasing overall system yield.

wafer prober

The wafer prober also exercises any test circuitry on the wafer scribe lines. Some companies get most of their information about device performance from these scribe line test structures.

Probe Systems

When all test patterns pass for a specific die, its position is remembered for later use during IC packaging. Sometimes a die has internal spare resources available for repairing i.

If redundancy of failed die is not possible the die is considered faulty and is discarded. This map categorizes the passing and non-passing dies by making use of bins. A bin is then defined as a good or bad die.

This wafermap is then sent to the die attachment process which then only picks up the passing circuits by selecting the bin number of good dies. The process where no ink dot is used to mark the bad dies is named substrate mapping.

When ink dots are used, vision systems on subsequent die handling equipment can disqualify the die by recognizing the ink dot. In some very specific cases, a die that passes some but not all test patterns can still be used as a product, typically with limited functionality. The most common example of this is a microprocessor for which only one part of the on-die cache memory is functional. In this case, the processor can sometimes still be sold as a lower cost part with a smaller amount of memory and thus lower performance.

Additionally when bad dies have been identified, the die from the bad bin can be used by production personnel for assembly line setup. The contents of all test patterns and the sequence by which they are applied to an integrated circuit are called the test program. After IC packaging, a packaged chip will be tested again during the IC testing phase, usually with the same or very similar test patterns.

For this reason, it may be thought that wafer testing is an unnecessary, redundant step. In reality this is not usually the case, since the removal of defective dies saves the considerable cost of packaging faulty devices. However, when the production yield is so high that wafer testing is more expensive than the packaging cost of defect devices, the wafer testing step can be skipped altogether and dies will undergo blind assembly. From Wikipedia, the free encyclopedia. Redirected from Wafer prober.

Categories : Semiconductor device fabrication. Namespaces Article Talk. Views Read Edit View history. By using this site, you agree to the Terms of Use and Privacy Policy.Our probe systems help increase process performance while reducing cost of ownership.

Whatever the application - device characterization, modeling, process development, design de-bug or IC failure analysis, Cascade mm manual and automated wafer probe stations have the precision and versatility needed for the most advanced semiconductor processes and aggressively scaled devices.

Cascade mm probe stations set the standard for manual and automated on-wafer test, delivering the precision and versatility needed to address a wide range of advanced, complex testing requirements.

We offer affordable and complete horizontal and vertical board test systems, enabling precision electrical measurements of IC packages and circuit boards. The broad use of power semiconductors has created a pressing need to characterize power devices quickly and efficiently. Cascade offers on-wafer power device characterization systems to reduce time-to-market for new power devices and to keep up with production.

For MEMS devices that require test in a high vacuum or controlled pressure environment, and for IR imaging devices or cutting edge technologies that require testing at cryogenic temperatures, our special vacuum, pressure and cryogenic probe stations enable precise on-wafer measurements in extreme environments.

We offer several unique software solutions that enhance the functionality of your wafer-level test system. Product Filter Expand to filter products Clear all Filters. Board Test Systems We offer affordable and complete horizontal and vertical board test systems, enabling precision electrical measurements of IC packages and circuit boards.

Power Systems The broad use of power semiconductors has created a pressing need to characterize power devices quickly and efficiently. Software We offer several unique software solutions that enhance the functionality of your wafer-level test system. Custom Probe Systems Customized solutions for a variety of challenging applications. Certified Used Equipment.

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Privacy Policy Web Terms of Use. All Rights Reserved. We've updated our Privacy Policy. Our policy describes the use of cookies and similar technologies on this website. It also describes how we use any personal data we collect. To learn more, please read the FormFactor Privacy Policy.We design, test, and manufacture a wide range of wafer probes in order to provide customers numerous options when configuring a probe station to best meet their testing requirements.

Our consumable accessories are state-of-the-art tools used to address applications ranging from general purpose DC characterization, high speed, wide bandwidth, to low current and high power. At Micromanipulator our goal is to bring the technology to system operators so they can focus on data, not the prober. Whether it is personal preferences, measurement equipment interface requirements, application demands, or budget, our large selection of wafer probes allows you to find just the right model for your needs.

To assist with that, we provide information on specifications and the recommended applications for our manipulators, probe holders and probe tips with precise data charts and Product Documents pdfs. You will find solutions for your most complicated requirements with our uniquely shaped and malleable bendable probe holders. One example is our Model 72 that can be shaped and reshaped as desired. Furthermore, if a more exact configuration is required, custom probe holders are available on request.

Micromanipulator is the leading manufacturer of wafer probes and offers the most comprehensive range of probe stations on the market.

Our success lies in the fact that we put customer satisfaction first and listen and learn from them. We not only invented analytical probing inbut Micromanipulator is the leading name in the field. We reliably deliver the tools and life cycle support the semiconductor industry depends on.

We invite you to take a look at our exceptional selection of high-tech wafer probes. Probe Tips Request a Quote. Home Wafer Probes.The answer is yes to all but in reality, there is very little difference in how we manufacture a probe system to meet all of the frequency bands mentioned above and below.

While all of these terms are used, the most common term for a high frequency wafer probe system is RF Wafer Probe. We design our RF Wafer Probe systems to meet the customers application and budget.

When required the customer can add new modules and accessories in the field to address their new requirements see PS4L — Wafer Probe Testing System for Life. The application will indicate the frequency the RF Wafer Probe will get configured to meet.

We manufacture a line of manual, semiautomatic and fully automatic wafer probe systems with a complete line of modules and accessories to support a variety of RF frequencies and bands. UHF operates from 0. Most RF Wafer Probe systems are configured to test in the microwave range 0.

Unfortunately, there are several incompatible naming systems for microwave bands around the world and even within a given system the exact frequency range designated by a letter may vary somewhat between different application areas. Topics: High Frequency. Partner Resources Request for Proposal. They are typically larger, made of steel or have a steel skin and can also have tapped and drilled mounting holes. In most cases the larger manipulators with mounts for extension modules or tuners are bolted into place due to the cantilevered weights of the instruments.

Wafer Chucks — both standard and thermal chuck top surfaces are manufactured with small vacuum holes to minimize the mechanical stress on III-V materials. Wafer Chucks can be round or square, made from aluminum or steel and have nickel or gold plating. Calibration Substrate Holders — used on both standard and thermal chucks.

Two 2 are normally provided and the substrates are held in place with independent vacuum lines wafer chuck and calibration substrate holders have independent vacuum lines.

Manipulators — doe to the additional weights of the cables and probes GS,SG, GSG, Differential and multi-contact wedgestuners and extension modules, the manipulators have to be rigid and offered with both magnetic and bolt down bases.

They also manufacture calibration substrates. The customer selects the probes and calibration substrates they want to use and we integrate them to be used on our probe systems.

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RF Probe Cables — Several worldwide manufacturers and types. Cables manufactured by Junkosha, Gore Mega-Phase and more are often used. We just need to know what frequency you want to test at and will either use what the customer is already using or include them with the probe system.

RF Test Probe Instrumentation — the customer typically has or will purchase the test instrumentation directly from the manufacturer.

We just have to make sure we can interface to them. SemiProbe just has to make sure we have mechanical mounts for the wide assortment of tuners offered.

RF Test Probe Instrumentation Racks — SemiProbe has developed a family of test instrumentation racks that are adjustable and designed to allow easy access to the test instrumentation while keeping cable lengths to a minimum. Facebook Twitter Pinterest Linkedin Email.

Author: Denis Place.

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Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company. Find me on: LinkedIn. Subscribe to our email list. Subscribe to our Newsletter For the latest SemiProbe updates and show schedules.

Site by.Wafer Probers are machines which are required for electrically testing the wafers of individual chips. The Prober therefore undertakes the fully automatic loading and handling of the wafer while ensuring the best positioning accuracy. A full test cell consists of a wafer prober, a test unit and a probe card.

Wafer testing

Our flagship wafer probers for wafers up to mm or mm diameter not only work with the highest precision thanks to the latest technology, but also ensure maximum capacity and productivity with their above average and high throughput. The right solution for every requirement: from proven, fully automatic basic models to ultra-quick high end models with the highest precision in a large temperature range.

Can be adapted to all testing environments and make simple handling and navigation possible. Great flexibility. The Frame Handling Probers can be used for both testing ultra-thin wafers and for wafers on a dicing frame.

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wafer prober

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If you refuse cookies we will remove all set cookies in our domain. We provide you with a list of stored cookies on your computer in our domain so you can check what we stored.When a die or array of die have been electrically tested the prober moves the wafer to the next die or array and the next test can start. The wafer prober is typically also responsible for loading and unloading the wafers from their carrier and is equipped with automatic pattern recognition optics capable of aligning the wafer with sufficient accuracy to ensure accurate registration between the contact pads on the wafer and the tips of the probes.

We offer complete sourcing and parts support for our customers. We pride ourselves in the satisfaction of our customers and we partner with them to provide solutions to capacity needs in a timely manner. We work with our customers to plan for large and small capacity increases as well as integrating thermal and OCR solutions for their changing test requirements.

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We leverage our connections to other global operations to supply products and support to customers around the world. Our facility in Oregon allows for acceptance testing and co-development with our partners and customers. Learn More. Automatic Identification for Wafer Traceability.

Corporate Profile — Overview Prober. Facilities We leverage our connections to other global operations to supply products and support to customers around the world.


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